Electronic grade phosphoric acid
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Keywords:
ENGINEERING CASE
Phosphorus Chemical
Phosphoric Acid Plant
Product details
Asia Chemical Engineering Co., Ltd. is one of the most reliable manufacturers and suppliers of Electronic grade phosphoric plants in China. Please rest assured to wholesale cost-efficient Electronic grade phosphoric plants from our factory. Good service and reasonable price are available.
Product Details
Name: Electronic‑Grade Phosphoric Acid Production Line
Capacity: 0.2‑5 10,000 tons per year, customizable
EPC Turnkey Project: Raw materials adopt food‑grade / refined industrial phosphoric acid for further deep purification. It is equipped with Class 100 / Class 1000 clean workshops, targeting overseas semiconductor and display panel projects.
Mainstream Process Routes for Electronic‑Grade Phosphoric Acid Production Line
Raw Material: Food‑grade phosphoric acid as feedstock
Process Flow: Feed of high‑purity phosphoric acid raw material → pre‑filtration → purification via multi‑stage melt crystallization → removal of impurity mother liquor by crystallization separation → concentration adjustment with ultrapure water → multi‑stage ultrapure precision filtration (particle removal) → TOC removal and impurity stripping → on‑line impurity detection by ICP‑MS → storage in clean storage tanks → clean filling.
Features of Electronic‑Grade Phosphoric Acid Production Line
1. Using food‑grade phosphoric acid as raw material, the melt crystallization process delivers strong removal capacity for metallic impurities, enabling production of full‑grade E1/E2/E3 products;
2. The complete unit is equipped with a clean workshop, adopting PFA / high‑purity graphite materials to avoid secondary pollution;
3. On‑line ICP‑MS conducts real‑time monitoring of ppb‑level metallic impurities, with automatic bypass for non‑conforming materials;
4. EPC turnkey service available: process package, equipment manufacturing, clean workshop design, installation and commissioning, personnel training;
5. Mother liquor can be recycled and returned to the front‑end process for high raw material utilization rate.
Uses of Electronic‑Grade Phosphoric Acid Products
1. Semiconductor wafers: wet‑etching of silicon nitride and silicon dioxide, silicon wafer cleaning, photoresist stripping processes; national standard information on core wet‑chemicals for 12‑inch advanced chip manufacturing…
2. Etching and cleaning for TFT‑LCD and OLED panels
3. Photovoltaic silicon wafer cleaning
4. Preparation of ultra‑high‑purity phosphate raw materials
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